Huber, Thomas M.

The ultrasound radiation force can be used as a noncontact method for exciting vibrational modes. In one implementation, an audio-range modulation signal is combined with a 40-kHz carrier to form a double-sideband suppressed-carrier (DSSC) waveform that is emitted from an ultrasound transducer. The frequency of the ultrasound radiation force is the difference between the frequencies of the sidebands, therefore at twice the modulation frequency. We describe a method for selective mode excitation using a transducer pair, each emitting a DSSC signal. The modulation signal for one transducer was phase shifted relative to the other transducer. When the two modulation signals were in phase, the radiation stress field was uniform. For devices studied, this excited transverse modes while suppressing torsional modes. Similarly, if the modulation signals were out of phase, torsional modes were excited while suppressing transverse modes. This technique has been demonstrated for devices including an MEMS mirror, hard-drive suspension, and brass cantilever. For a cantilever, the ratio of the amplitudes of 180-Hz transverse over 1.3-kHz torsional modes was varied by over two orders of magnitude by shifting the phase difference between the two beams over a range of 90 deg. This noncontact technique allows control over the types of vibration excited.

The head-gimbal assembly suspension is a cantilever-like structure that holds the heads on a hard drive. We will discuss a noncontact method for modal testing, of suspensions in air, that utilizes the radiation force at the difference frequency generated by two intersecting ultrasound beams. The resulting low-frequency excitations were measured using a scanning vibrometer. This excitation technique has been demonstrated for MEMS and other small devices. There are several unique advantages of the ultrasound radiation force relative to mechanical shakers. Since the ultrasound radiation force is noncontact, a specialized test fixture was not needed; the technique was relatively insensitive to distracting resonances of fixtures and support structures. Another advantage is broadband excitation; a 550-kHz confocal ultrasound transducer excited suspension resonance frequencies from under 1 kHz to over 50 kHz. Other advantages include the ability to selectively excite different modes. For example, the amplitude of the suspension’s 2.28-kHz transverse mode was suppressed by an order of magnitude by shifting the modulation phase between the two ultrasound beams by 90. In another test, the amplitude of the 6.01-kHz torsional mode was doubled by moving the ultrasound focus point from near the center to near the edge of the suspension.

With the advent of MEMS, modal analysis of small structures is increasingly important. However, conventional excitation techniques normally require contact, which may not be feasible for small objects. We present a non-contact method that uses interference of ultrasound frequencies in air to produce low-frequency excitation of structures. Objects studied included hard-drive HGA suspensions and MEMS devices. The vibration induced by the ultrasound radiation force was varied in a wide range from 0 Hz to 50 kHz. Object motion was detected using a laser vibrometer; measured frequencies agreed with expected values. Also demonstrated was the unique capability to selectively enhance or suppress modes independently. For example, the ratio of the vibrational amplitudes of the 175 Hz first-bending and 1.33 kHz torsional modes of a small cantilever could be changed from in excess of 10:1 to less than 1:10 by shifting the ultrasound modulation phase 90 degrees. Similar changes were obtained for a 3 mm square MEMS mirror in the ratios of vibration amplitude around its two separate axes. Torsional modes of a hard-drive suspension could be selectively enhanced by over a factor of two by moving the ultrasound focus point from near the center to near the edge of the suspension.

The goal of this experiment was to excite and measure, in a noncontact manner, the vibrational modes of the reed from a reed organ pipe. To perform ultrasound stimulated excitation, two ultrasound beams in air of different frequencies were directed at the reed; the audio-range beat frequency between these ultrasound beams induced vibrations. The resulting vibrational deflection shapes were measured with a scanning vibrometer. The modes of any relatively small object can be studied in air using this technique. For a 36 mm by 7 mm clamped brass reed cantilever, displacements and velocites of 5 μ and 4 mm/s could be imparted at the fundamental frequency of 145 Hz. Using the same ultrasound transducer, excitation across the entire range of audio frequencies was obtained, which was not possible using audio excitation with a speaker. Since the beam was focused on the reed, ultrasound stimulated excitation eliminated background effects observed during mechanical shaker excitation, such as vibrations of clamps and supports. We will discuss the results obtained using single, dual, and confocal ultrasound transducers in AM and unmodulated CW modes, along with results obtained using a mechanical shaker and audio excitation using a speaker.

The goal of this study was to excite and measure, in a noncontact manner, the vibrational modes of the reed from a reed organ pipe. To perform ultrasound stimulated excitation, the audio-range difference frequency between a pair of ultrasound beams produced a radiation force that induced vibrations. The resulting vibrational deflection shapes were measured with a scanning laser vibrometer. The resonances of any relatively small object can be studied in air using this technique. For a 36mm×6mm brass reed, displacements and velocities in excess of 5μm and 4mm∕s could be imparted at the fundamental frequency of 145Hz. Using the same ultrasound transducer, excitation across the entire range of audio frequencies was obtained. Since the beam was focused on the reed, ultrasound stimulated excitation eliminated background effects observed during mechanical shaker excitation, such as vibrations of clamps and supports. The results obtained using single, dual and confocal ultrasound transducers in AM and two-beam modes, along with results obtained using a mechanical shaker and audio excitation using a speaker are discussed.